Optical lithography and nano imprint lithography
Top side UV-lithography, Bottom side UV-lithography, Micro and nanoimprint lithography (SMILE), UV-bonding
Optical thin-film coating
IBS NAVIGATOR 700 (Cutting Edge Coatings GmbH, 2016) is an optical coater designed for automatic coating of planar glass substrates. The system utilizes broadband optical monitoring (BBM) through monitor fused silica windows or layers can be deposited using time control.
Perovskite solar cell fabrication
Two nitrogen-filled glove boxes (<0.1 ppm water, <0.1 ppm oxygen) equipped with spin coaters, balances, and hot plates for processing samples in solution.
Photonic glasses
We host various tools for fabrication of photonic glass materials.Polarized optical microscope (POM)
Zeiss Axio Imager Pol polarized light microscope. Fitted with a regular rotating stage and a Linkam cooling/heating stage.
Precise diamond saw for wafer dicing and other applications
Disco Automatic dicing saw model DAD3221 and connected to DTU162 water temperature control unit.
Precise wafer dicing using scribe and break method
Loomis LSD-100 scriber is a system for wafer dicing.