Fabrication Micro- and Nanopatterning
Fabrication
Our capabilities cover a wide range of materials including carbon-based materials, semiconductors, photovoltaic materials, coatings, thin-films, and glasses. We also have a wide range of fabrication methods including epitaxy, lithography, atomic layer deposition, and 3D printing optics.
Fabrication Micro- and Nanopatterning
Nanoimprint Lithography, NIL
We offer both master element fabrication and nanoimprint lithography services.
Fabrication Micro- and Nanopatterning
Spin coating
Spin coating is a method to apply a uniform film onto a solid surface by using centrifugal force and requires a liquid–vapor interface.
Fabrication Thin film deposition and epitaxy
Atomic layer deposition
Picosun Sunale ALD R200 Advanced reactor for deposition of thin films
Fabrication Micro- and Nanopatterning
Digital holographic microscopy and interference lithography
Digital holographic microscopy (DHM) is a quantitative phase imaging technique, where both the amplitude and phase of light interacting with a sample are measured. The phase contains information on the height and refractive index variations on a sample. In the…
Fabrication Thin film deposition and epitaxy
Molecular beam epitaxy
We host five molecular beam epitaxy (MBE) systems equipped for the growth of all common GaAs, InP, and GaSb-based materials as well as more exotic III-V compounds.
Fabrication Micro- and Nanopatterning
Optical lithography
Top side UV-lithography, Bottom side UV-lithography, Micro and nanoimprint lithography (SMILE), UV-bonding
Fabrication Thin film deposition and epitaxy
Optical thin-film coating
IBS NAVIGATOR 700 (Cutting Edge Coatings GmbH, 2016) is an optical coater designed for automatic coating of planar glass substrates. The system utilizes broadband optical monitoring (BBM) through monitor fused silica windows or layers can be deposited using time control.
Fabrication Material processing
Photonic glasses
We host various tools for fabrication of photonic glass materials.
Fabrication Material processing
