Fabrication Micro- and Nanopatterning
Fabrication
Our capabilities cover a wide range of materials including carbon-based materials, semiconductors, photovoltaic materials, coatings, thin-films, and glasses. We also have a wide range of fabrication methods including epitaxy, lithography, atomic layer deposition, and 3D printing optics.
Fabrication Micro- and Nanopatterning
Nanoimprint Lithography, NIL
We offer both master element fabrication and nanoimprint lithography services.
Fabrication Micro- and Nanopatterning
Spin coating
Spin coating is a method to apply a uniform film onto a solid surface by using centrifugal force and requires a liquid–vapor interface.
Fabrication Thin film deposition and epitaxy
Atomic layer deposition
Picosun Sunale ALD R200 Advanced reactor for deposition of thin films
Fabrication Micro- and Nanopatterning
Digital holographic microscopy and interference lithography
Digital holographic microscopy (DHM) is a quantitative phase imaging technique, where both the amplitude and phase of light interacting with a sample are measured. The phase contains information on the height and refractive index variations on a sample. In the…
Fabrication Micro- and Nanopatterning
Interference lithography (digital holographic microscope)
The digital holographic microscope in Tampere University is integrated with an interference lithography system.
Fabrication Micro- and Nanopatterning
Langmuir-Blodgett film deposition system with Brewster angle microscope
The surface pressure area isotherms and Brewster angle microscope (BAM) images are measured simultaneously.
Fabrication Material processing
Micro-manipulating system
This home-made manipulating system is for local laser excitation, object transferring and positioning at the microscopic scale.
Fabrication Thin film deposition and epitaxy
Molecular beam epitaxy
We host five molecular beam epitaxy (MBE) systems equipped for the growth of all common GaAs, InP, and GaSb-based materials as well as more exotic III-V compounds.
Fabrication Micro- and Nanopatterning
Optical lithography
Top side UV-lithography, Bottom side UV-lithography, Micro and nanoimprint lithography (SMILE), UV-bonding
Fabrication Thin film deposition and epitaxy
Optical thin-film coating
IBS NAVIGATOR 700 (Cutting Edge Coatings GmbH, 2016) is an optical coater designed for automatic coating of planar glass substrates. The system utilizes broadband optical monitoring (BBM) through monitor fused silica windows or layers can be deposited using time control.
Fabrication Material processing
Perovskite solar cell fabrication
Two nitrogen-filled glove boxes (<0.1 ppm water, <0.1 ppm oxygen) equipped with spin coaters, balances, and hot plates for processing samples in solution.
Fabrication Material processing