Fabrication Material processing
Micro-manipulating system
This home-made manipulating system is for local laser excitation, object transferring and positioning at the microscopic scale.
Fabrication Material processing
Perovskite solar cell fabrication
Two nitrogen-filled glove boxes (<0.1 ppm water, <0.1 ppm oxygen) equipped with spin coaters, balances, and hot plates for processing samples in solution.
Fabrication Material processing
Photonic glasses
We host various tools for fabrication of photonic glass materials.
Fabrication Material processing
Precise diamond saw for wafer dicing and other applications
Disco Automatic dicing saw model DAD3221 and connected to DTU162 water temperature control unit.
Fabrication Material processing
Rapid thermal annealing of semiconductor wafers (RTA / RTP)
Jipelec Jetfirst100 is a rapid thermal annealing (RTA) system that can be used for thermal processing such as increasing/decreasing defects in crystalline materials, inducing phase changes etc.
Fabrication Material processing
SiO2 and SiN deposition using plasma enhanced CVD (PECVD)
Two Plasmalab 80+ Plasma Enhanced Chemical Vapor Deposition systems (PECVDs) (Oxford Plasma Technology, 2000) are used for thin film growths and plasma treatments. Normal process temperature is 300 °C and the operatable range is from room temperature to 400 °C.…
Fabrication Material processing
