Siirry sisältöön

Direct writing lithography system

Heidelberg Instruments µPG-501 is a DLP-LED based maskless lithography system which can be used for three applications: Fabrication of photomasks, Maskless UV-lithography directly to wafers, and Grey-scale lithography.

Electron spectroscopy

The Multilab/Argus Electron Spectrometer includes instruments for Selected-area and Imaging X-ray Photoelectron Spectroscopy (SAXPS/iXPS). The UHV system is modular including also preparation chambers equipped with various in situ sample preparation and fabrication facilities.

Femtosecond systems

Femtosecond lasers create trains of sub pico-second pulses, at various repetition rates and pulse energies. They usually have good mode quality and high temporal stability.
Keopsys fiber laser

Fiber lasers

Fiber lasers usually offer small size and user-friendly operation, especially when used in fiber-based experiments. They can be designed to operate in all pulse duration regimes.