Atomic layer deposition
Picosun Sunale ALD R200 Advanced reactor for deposition of thin films
Electron beam lithography equipment
STS-Elionix ELS-BODEN Electron beam lithography system
Molecular beam epitaxy
We host five molecular beam epitaxy (MBE) systems equipped for the growth of all common GaAs, InP, and GaSb-based materials as well as more exotic III-V compounds.