Scanning Probe Microscopy

Scanning probe microscopy (SPM) includes several different microscopy techniques which have in common that sharp tip or sensor is placed near the sample surface in interaction with it and sample position under is scanned over area of interest. Typical examples of SPM tools are atomic force microscopes (AFM) and scanning near-field optical microscopes (SNOM). At best, SPM offers atomic level resolution and can provide quantitative microscopic 2.5D images.

Scanning Probe Microscopy at VTT in Espoo

Services in MIKES (Contact person: Virpi Korpelainen)

Our equipment and services include traceable measurements and characterizations with::

• Interferometrically Traceable Metrology Atomic Force Microscope (IT-MAFM)
• Jupiter XR AFM
  •  AC air (tapping mode): is a dynamic AFM technique that images the sample topography.
  • AM / FM: The cantilever is simultaneously driven at 1st and 2nd eigenmode (topography and elasticity, respectively).
  • Fast Force Map: Deflection technique that allows users to acquire data (topography, adhesion, mechanical, electrical properties, etc…
  • Kelvin Probe Microscopy (KPM): This mode measures a potential difference of the contact between the probe tip and the sample.
  • Electrostatic Force Microscopy (EFM): This mode measures a frequency shift due to the electric force gradient between the probe tip and the sample.
  • Piezo Force Microscopy (PFM): This mode measures the vertical piezo polarization of the sample.
  • Magnetic force Microscopy (MFM): This mode measures the magnetic field gradient of a sample.
  • Conductive AFM (CAFM -ORCA): In this mode a current will pass through the chuck and the AFM measures the current through the sample.
  • Scanning Capacitance microscopy (SCM): In this mode, the set (tip + oxide layer + semi-conductor sample) responds as a MOS capacitor.

Services in Micronova (Contact person: Sami Ylinen)

Our equipment  include:

• Jupiter XR AFM, in clean room at Micronova.