Lyncée Tec DHM R2104 with sample stage heating control + self-built interference lithography addition (488 nm).
Details
Location:
Tampere University (TAU), Tampere
Contact person:
Suvi Lehtimäki (Tampere)
Info:
Lyncée Tec DHM R2104 with sample stage heating control + self-built interference lithography addition (488 nm). Measurement of sample surface topology with 1 nm z-resolution through light interference imaging.
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