The service includes ellipsometry and prism coupler techniques.
Refractive index and thin film thickness characterization
Details
Location:
University of Eastern Finland (UEF), VTT, Tampere University (TAU), Espoo, Joensuu, Oulu, Tampere
Contact persons:
Pertti Pääkkönen (Joensuu), Jarno Petäjä (Oulu), Laeticia Petit (Tampere), Sami Ylinen (Espoo)
Wavelength:
UV (150 nm - 400 nm), VIS (400 nm - 700 nm), NIR (700 nm - 1200 nm), SWIR (1.2 µm - 2.5 µm)
Info:
The material optical properties can be characterized using Variable Angle Spectral Ellipsometry (VASE) or Prism coupler, which enables measurement of thin film optical properties and film thicknesses.
Our equipment:
- J.A. Woollam VASE ellipsometer for refractive indices, film, and film stack thicknesses measurements, spectral range 250 – 2070 nm; contact Pertti Pääkkönen (UEF, Joensuu)
- FilmTek 2000M reflectometer for refractive indices, film, and film stack thicknesses measurements, spectral range 400 – 1000 nm; contact Sami Ylinen (VTT, Espoo)
- FilmTek 2000M reflectometer for refractive indices, film, and film stack thicknesses measurements, spectral range 400 – 1700 nm; contact Sami Ylinen (VTT, Espoo)
- Metricon Model 2010/M prism coupler for refractive index and thickness measurement of a single film. Three measurement wavelengths: 532 nm, 635 nm, and 1550 nm; contact Pertti Pääkkönen (UEF, Joensuu)
- METRICON Model 2010/M prism coupler, refractive index measurement at 5 different wavelengths (from 450 to 1550 nm), 2010-WGL2 waveguide loss option (moving fiber) for 600-1600 nm, (minimum recommended sample size in direction of propagation is 4 cm (sample may be smaller in the transverse direction); Laeticia Petit (TAU, Tampere)
- Metricon thin film analysis system; contact Jarno Petäjä (VTT, Oulu)
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