Measuring sample surfaces with a contact probe is fast and accurate method for most surfaces.
Details
Location:
VTT, University of Eastern Finland (UEF), Espoo, Joensuu
Info:
FinnLight offers mechanical surface profilometry for the characterization of surfaces with nanometer-scale precision. Modern contact probe profilometer can provide 2.5D surface form of the samples with few nanometer resolution. Note that there is a separate page for scanning probe microscopy.
Mechanical surface profilometry at VTT in Espoo
- Bruker DektakXT, suitable for the surface profiling of wafers and chips in the Micronova cleanroom (Contact person: Sami Ylinen)
- Traceable measurements and characterizations in MIKES with Taylor Hobson Form Talysurf, surface roughness and form measuring machine (Contact person: Antti Lassila)
Mechanical surface profilometry at UEF in Joensuu
Contact person at UEF is Pertti Pääkkönen. Instruments include
- Panasonic UA3P-3100 A50 ultrahigh accuracy 3D profilometer
- Dektak 150+ stylus profilometer
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