Siirry sisältöön
Characterization Surface and shape analysis

Electron Microscopy

SEM Image of a grating

Electron microscopy utilizes an electron beam to study the properties of the sample. Includes scanning electron microscopy (SEM).


Location: University of Eastern Finland (UEF), VTT, Tampere University (TAU), Espoo, Joensuu, Tampere
Contact persons: Pertti Pääkkönen (Joensuu), Virpi Korpelainen (Espoo), Kimmo Lahtonen (Tampere)

Different electron beam techniques provide high resolution images of sample at best nanometer scale resolution. They can also be used together with computer tomography software to provide 3D information of the sample. Some electron microscopy techniques can reveal material properties of the sample.

Services at UEF in Joensuu (Contact person Pertti Pääkkönen)

Our equipment includes:

  • LEO 1550 scanning electron microscope
  • Alicona Mex-3D surface shape generation software for electron microscopy

Services at VTT in Espoo (Contact person Virpi Korpelainen)

Our equipment and services include traceable measurements and characterizations with:

  • Zeiss Crossbeam 540 SEM (scanning electron microscope)

Services at TAU in Tampere (Contact person Kimmo Lahtonen)

Our equipment and service include:

  • Various characterization measurements with NanoESCA spectromicroscope

Measurement modes

  • Photoemission Electron Microscopy (PEEM)
  • Energy Filtered Photoemission Electron Microscopy (EF-PEEM)
  • X-ray Photoelectron Spectroscopy (XPS), e.g., for measurement of surface and interface composition
  • Imaging X-ray Photoelectron Spectroscopy (iXPS)
  • Ultraviolet Photoelectron Spectroscopy (UPS), e.g., for measurement of workfunction
  • Imaging Ultraviolet Photoelectron Spectroscopy (iUPS)
  • Selected area small spot spectroscopy
  • Reciprocal space imaging

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